Invention Application
- Patent Title: ANGULAR RATE SENSOR WITH CENTRALLY POSITIONED COUPLING STRUCTURES
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Application No.: US17178167Application Date: 2021-02-17
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Publication No.: US20220260372A1Publication Date: 2022-08-18
- Inventor: Aaron A. Geisberger , Peng Shao
- Applicant: NXP USA, Inc.
- Applicant Address: US TX AUSTIN
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX AUSTIN
- Main IPC: G01C19/5712
- IPC: G01C19/5712

Abstract:
An angular rate sensor includes first, second, third, and fourth proof masses spaced apart from a surface of a substrate, each of the first, second, third, and fourth proof masses being configured to move along first and second transverse axes parallel to the surface of the substrate. A first coupling structure is interposed between and interconnects the first and second proof masses. A second coupling structure is interposed between and interconnects the second and third proof masses. A third coupling structure is interposed between and interconnects the third and fourth proof masses. A fourth coupling structure is interposed between and interconnects the fourth and first proof masses. The first, second, third, and fourth coupling structures are configured to constrain an in-phase motion of adjacent ones of the first, second, third, and fourth proof masses along the first and second transverse axes.
Public/Granted literature
- US11525680B2 Angular rate sensor with centrally positioned coupling structures Public/Granted day:2022-12-13
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