A method of making a spot size converter comprising a multi-tip waveguide comprising a first and a second waveguide portions, the method comprising the steps of: coating a multilayer wafer comprising a waveguide material layer with a resist material; exposing the coated resist material to a deep UV beam or an electron beam; developing resist material to form an partial waveguide pattern within the resist material; transferring the partial waveguide pattern to the waveguide material layer, forming an initial waveguide; placing a second layer of resist material over the initial waveguide; patterning a tapered gap region shape in the second layer of resist material by exposing the second layer of resist material to a deep UV beam or an electron beam; and transferring the tapered gap region shape to the waveguide material layer of the initial waveguide to form a tapered gap region inside the initial waveguide.