Invention Application
- Patent Title: PHOTOSENSOR, SENSOR UNIT, AND OBJECT DETECTION APPARATUS USING PHOTOSENSOR
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Application No.: US17631147Application Date: 2020-07-30
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Publication No.: US20220271211A1Publication Date: 2022-08-25
- Inventor: Tadaaki NAGAO , Duy Thang DAO
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Ibaraki
- Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Ibaraki
- Priority: JP2019-142927 20190802
- International Application: PCT/JP2020/029266 WO 20200730
- Main IPC: H01L37/02
- IPC: H01L37/02 ; H01L27/16 ; G01J5/20

Abstract:
A photothermal converter using a wavelength selective perfect absorber made of a low-loss metal material or dielectric and a heat detection sensor are combined to develop a sensor that efficiently converts light of a specific wavelength into heat and further electrically detects the heat. Here, since the wavelength selective perfect absorber of the present invention has a periodic structure, it has high directivity, and can also be used as a small motion sensor or a watching sensor using detection of thermal radiation. In addition, it can also be used as a high-precision small position sensor by being combined with a laser light source matching the resonance wavelength of the sensor.
Public/Granted literature
- US12295266B2 Photosensor, sensor unit, and object detection apparatus using photosensor Public/Granted day:2025-05-06
Information query
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