Invention Application
- Patent Title: Method For Manufacturing Vibration Element
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Application No.: US17679280Application Date: 2022-02-24
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Publication No.: US20220271725A1Publication Date: 2022-08-25
- Inventor: Hiyori SAKATA , Takuro KOBAYASHI , Ryuta NISHIZAWA , Shigeru SHIRAISHI , Keiichi YAMAGUCHI
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2021-028273 20210225,JP2021-137808 20210826
- Main IPC: H03H3/013
- IPC: H03H3/013

Abstract:
A method for manufacturing a vibration element includes: a first dry etching step of dry etching the quartz crystal substrate from a first surface and forming first grooves and contours of a first vibrating arm and a second vibrating arm on the first surface; and a second dry etching step of dry etching the quartz crystal substrate from a second surface side and forming second grooves and contours of the first vibrating arm and the second vibrating arm on the second surface, in which Wa/Aa
Public/Granted literature
- US12199583B2 Method for manufacturing vibration element Public/Granted day:2025-01-14
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