Invention Application
- Patent Title: Dinuclear Molybdenum Precursors For Deposition Of Molybdenum-Containing Films
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Application No.: US17747044Application Date: 2022-05-18
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Publication No.: US20220275012A1Publication Date: 2022-09-01
- Inventor: Andrea Leoncini , Paul Mehlmann , Nemanja Dordevic , Han Vinh Huynh , Doreen Wei Ying Yong
- Applicant: Applied Materials, Inc. , National University of Singapore
- Applicant Address: US CA Santa Clara; SG Singapore
- Assignee: Applied Materials, Inc.,National University of Singapore
- Current Assignee: Applied Materials, Inc.,National University of Singapore
- Current Assignee Address: US CA Santa Clara; SG Singapore
- Main IPC: C07F11/00
- IPC: C07F11/00 ; C23C16/18 ; C23C16/455
Abstract:
Dinuclear molybdenum coordination complexes are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a dinuclear molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
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