- 专利标题: INTEGRATED ELECTROMAGNETIC-ACOUSTIC SENSOR AND SENSING
-
申请号: US17187251申请日: 2021-02-26
-
公开(公告)号: US20220276363A1公开(公告)日: 2022-09-01
- 发明人: Ross F. JATOU , Danny ELAD , Dan CORCOS
- 申请人: Ay Dee Kay LLC dba Indie Semiconductor
- 申请人地址: US CA Aliso Viejo
- 专利权人: Ay Dee Kay LLC dba Indie Semiconductor
- 当前专利权人: Ay Dee Kay LLC dba Indie Semiconductor
- 当前专利权人地址: US CA Aliso Viejo
- 主分类号: G01S7/52
- IPC分类号: G01S7/52 ; B06B1/04 ; G01S15/931
摘要:
One illustrative integrated electromagnetic-acoustic sensor includes: a ground plane; a patch antenna above the ground plane to send or receive an electromagnetic (EM) signal having an EM signal frequency; and an array of capacitive micromachined acoustic transducers formed by cavities between the patch antenna and a base electrode to send or receive an acoustic signal having an acoustic signal frequency. One illustrative sensing method includes: driving or sensing a EM signal between a ground plane and a patch antenna; and driving or sensing an acoustic signal between the patch antenna and a base electrode, the base electrode and the patch antenna having an array of capacitive micromachined acoustic transducer cavities therebetween.
公开/授权文献
- US11914081B2 Integrated electromagnetic-acoustic sensor and sensing 公开/授权日:2024-02-27
信息查询