Some embodiments of the present disclosure relate to a manufacturing method using nano-imprint lithography for a diffraction grating waveguide of a near-eye display. The manufacturing method includes: manufacturing an imprint lithography template with a diffraction grating waveguide pattern; transferring the diffraction grating waveguide pattern of the imprint lithography template to a transferring template by nano-imprint lithography, so as to obtain a transferring template with a reverse pattern of the diffraction grating waveguide pattern; and transferring the reverse pattern of the diffraction grating waveguide pattern of the transferring template to a waveguide substrate by nano-imprint lithography, so as to obtain the diffraction grating waveguide of the near-eye display.