An imaging unit of a processing apparatus includes a microscope, and an imaging element connected to the microscope and including a plurality of pixels that capture an image. A control unit has a target pattern storage section that stores a target pattern for performing pattern matching, and a rectilinear region detection section that detects a rectilinear region on the basis of an image from the imaging element, calculates a deviation angle between a direction of the rectilinear region detected by the rectilinear region detection section and a processing feeding direction, and adjusts a relative angle between the target pattern stored in the target pattern storage section and a characteristic pattern on a wafer, to perform the pattern matching.