The present application discloses a method and a device for controlling a micro galvanometer of a solid-state LiDAR, and a solid-state LiDAR. The method includes acquiring a vertical angle range of a field of view scanned by the solid-state LiDAR, determining a first vertical angle of the field of view and a second vertical angle of the field of view corresponding to a preset ROI region of the solid-state LiDAR, reducing a slow axis scanning speed of the micro galvanometer to a first preset speed when it is monitored that the micro galvanometer scans the first vertical angle of the field of view, and adjusting the slow axis scanning speed of the micro galvanometer to a second preset speed when it is monitored that the micro galvanometer scans the second vertical angle of the field of view.