Invention Application
- Patent Title: PLASMA CHAMBER WITH ANCILLARY REACTION CHAMBER
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Application No.: US17654577Application Date: 2022-03-11
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Publication No.: US20220293400A1Publication Date: 2022-09-15
- Inventor: George Stephen Leonard, III , Stefan Andrew McClelland , John Joseph Rehagen , Jae Mo Koo
- Applicant: RECARBON, INC.
- Applicant Address: US CA Santa Clara
- Assignee: RECARBON, INC.
- Current Assignee: RECARBON, INC.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma reaction system may include a plasma chamber and an ancillary reaction chamber. The plasma chamber may include a plasma chamber inlet for introducing reactant gases into the plasma chamber, plasma chamber walls that form an interior space in which chemical reactions between the reactant gases may occur, a plasma generated within the plasma chamber, a waveguide for directing energy towards the plasma generated within the plasma chamber, and a plasma chamber outlet for carrying first outlet gases from the plasma chamber. The ancillary reaction chamber may include an ancillary reaction chamber inlet configured to obtain the first outlet gases from the plasma chamber, ancillary reaction chamber walls that form an interior space of the ancillary reaction chamber in which second chemical reactions between the outlet gases may occur, and an ancillary reaction chamber outlet for carrying second outlet gases from the ancillary reaction chamber.
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