Invention Application
- Patent Title: IMAGE SENSOR HAVING A GATE ELECTRODE ON A SEMICONDUCTOR PATTERN SIDE WALL
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Application No.: US17655582Application Date: 2022-03-21
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Publication No.: US20220302191A1Publication Date: 2022-09-22
- Inventor: YOUNGGU JIN , EUNSUB SHIM , JUNGCHAK AHN
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR SUWON-SI
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR SUWON-SI
- Priority: KR10-2021-0036918 20210322,KR10-2021-0185402 20211222
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor is provided. The image sensor includes a semiconductor substrate including a first surface and a second surface opposite to each other. A semiconductor pattern is disposed on the first surface of the semiconductor substrate and it extends in a first direction perpendicular to the first surface. A buried transmission gate electrode is disposed in a transmission gate trench extending from the first surface of the semiconductor substrate to an interior of the semiconductor substrate. A first gate electrode at least partially surrounds a side wall of the semiconductor pattern and has a ring-shaped horizontal cross-section. A color filter is disposed on the second surface of the semiconductor substrate.
Public/Granted literature
- US12166049B2 Image sensor having a gate electrode on a semiconductor pattern side wall Public/Granted day:2024-12-10
Information query
IPC分类: