Invention Application
- Patent Title: SEMICONDUCTOR DEVICE WITH FINE METAL LINES FOR BEOL STRUCTURE AND METHOD OF MANUFACTURING THE SAME
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Application No.: US17354593Application Date: 2021-06-22
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Publication No.: US20220336352A1Publication Date: 2022-10-20
- Inventor: Taeyong BAE , Hoonseok SEO
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L21/768

Abstract:
Provided is a semiconductor device including a a front-end-of-line (FEOL) structure and a back-end-of-line (BEOL) structure connected to the FEOL structure, wherein the FEOL structure includes at least one source/drain region and at least one gate structure, and the BEOL structure includes: a plurality of 1st fine metal lines arranged in a row with a same pitch, each of the plurality of 1st fine metal lines having a same width; and at least one 1st wide metal line formed at a side of the plurality of 1st fine metal lines, the 1st wide metal line having a width greater than the width of the 1st fine metal line, and wherein each of the plurality of 1st fine metal lines includes a material different from a material included in the 1st wide metal line
Public/Granted literature
- US11990409B2 Semiconductor device with fine metal lines for BEOL structure and method of manufacturing the same Public/Granted day:2024-05-21
Information query
IPC分类: