- 专利标题: SUBSTRATE STORAGE CONTAINER
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申请号: US17640336申请日: 2020-08-07
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公开(公告)号: US20220344186A1公开(公告)日: 2022-10-27
- 发明人: Junya TODA , Takashi SUDA
- 申请人: Shin-Etsu Polymer Co., Ltd.
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2019-161860 20190905
- 国际申请: PCT/JP2020/030400 WO 20200807
- 主分类号: H01L21/673
- IPC分类号: H01L21/673 ; H01L21/677
摘要:
According to one embodiment, a substrate storage container includes a transport component configured to be mountable to a container body by being relatively displaced with respect to the container body from the rear side to the front side. The container body has a container body-side protrusion protruding upward. The transport component has a transport component-side protrusion protruding downward. In a mounted state, the transport component-side protrusion is engaged with the front side of the container body-side protrusion to be restricted from being displaced backwards. When a predetermined load is applied to the transport component-side protrusion upwardly, the transport component-side protrusion is displaced by a smaller amount than the container body-side protrusion displaced when the predetermined load is applied to the container body-side protrusion downwardly.
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