Invention Application
- Patent Title: DEFORMATION DETECTION SENSOR
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Application No.: US17864019Application Date: 2022-07-13
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Publication No.: US20220344572A1Publication Date: 2022-10-27
- Inventor: Shingo HARADA , Hidekazu KANO , Mei WATANABE , Hiroaki KITADA
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-shi
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo-shi
- Priority: JP2020-129282 20200730
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H01L41/25 ; H01L41/312 ; H01L41/047 ; H01L41/083

Abstract:
A deformation detection sensor is provided that includes a detection electrode, a first ground electrode, a piezoelectric film sandwiched between the detection electrode and the first ground electrode, a substrate on which the detection electrode and a second ground electrode are formed, a wiring connected to the detection electrode, and a joint member that joins the wiring and the detection electrode.
Information query
IPC分类: