- 专利标题: SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VAPOR DEPOSITION EQUIPMENT
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申请号: US17466235申请日: 2021-09-03
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公开(公告)号: US20220349057A1公开(公告)日: 2022-11-03
- 发明人: Yen-Lin LAI , Jyun-De WU , Chi-Heng CHEN
- 申请人: PlayNitride Display Co., Ltd.
- 申请人地址: TW Zhunan Township
- 专利权人: PlayNitride Display Co., Ltd.
- 当前专利权人: PlayNitride Display Co., Ltd.
- 当前专利权人地址: TW Zhunan Township
- 优先权: TW110115281 20210428
- 主分类号: C23C16/458
- IPC分类号: C23C16/458 ; H01L21/687 ; C23C16/18
摘要:
A semiconductor wafer carrier structure is provided. The semiconductor wafer carrier structure includes a susceptor and a patterned heat conduction part disposed on the susceptor. At least a portion of the patterned heat conduction part has a different heat conduction coefficient than the susceptor. A metal-organic chemical vapor deposition equipment is also provided. The metal-organic chemical vapor deposition equipment includes a carrier body having a plurality of carrier units. The above semiconductor wafer carrier structure is placed in at least one of the carrier units.
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