Invention Application
- Patent Title: SUBSTRATE SUPPORT UNIT, THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME, AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
-
Application No.: US17864698Application Date: 2022-07-14
-
Publication No.: US20220349058A1Publication Date: 2022-11-03
- Inventor: KiChul Um , JeungHoon Han , DooHan Kim , YongGyu Han
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Priority: KR10-2018-0119746 20181008
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C23C16/455 ; C23C16/46 ; H01J37/32
Abstract:
A substrate support unit for thin film deposition on a substrate including a pattern structure and a thin film deposition apparatus including the substrate support unit includes a heater; an RF electrode; a first rod connected to the heater; a second rod connected to the RF electrode; and an RF shield spaced apart from the second rod, disposed to surround the second rod, and extending in an extension direction of the second rod.
Information query
IPC分类:
