HYPERSPECTRAL FILTER STRUCTURE AND METHOD OF MANUFACTURE
Abstract:
A sensor system includes a plurality of optical sensors implemented in a pixel layer of an integrated circuit and a plurality of sets of optical filters implemented proximal to the pixel layer in a plurality of alternating filter layers. An optical filter of a set of optical filters includes a plurality of filter components implemented in a stack and is configured to pass a respective target wavelength range of light to one or more optical sensors of the plurality of optical sensors. One or more filter components of the plurality of filter components in a filter layer of the plurality of filter layers is common to a plurality of optical filters of a set of optical filters.
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