• Patent Title: INSPECTION APPARATUS, MEASURING METHOD, AND COMPUTER READABLE MEDIUM
  • Application No.: US17625884
    Application Date: 2019-07-26
  • Publication No.: US20220358635A1
    Publication Date: 2022-11-10
  • Inventor: Akira TSUJI
  • Applicant: NEC Corporation
  • Applicant Address: JP Minato-ku, Tokyo
  • Assignee: NEC Corporation
  • Current Assignee: NEC Corporation
  • Current Assignee Address: JP Minato-ku, Tokyo
  • International Application: PCT/JP2019/029496 WO 20190726
  • Main IPC: G06T7/00
  • IPC: G06T7/00 G01S17/89
INSPECTION APPARATUS, MEASURING METHOD, AND COMPUTER READABLE MEDIUM
Abstract:
An inspection apparatus (10) includes: a three-dimensional sensor (11) configured to irradiate a member to be inspected with a beam and acquire point cloud data of the member to be inspected based on at least amplitude information of light; a direction identifying unit (12) configured to identify a predetermined direction in which there are the largest number of the point cloud data in the reference coordinate system which is coordinate axes for the member to be inspected; and a tilt amount determination unit (13) configured to determine a tilt amount for changing an arrangement of the reference coordinate system so that the number of the point cloud data in the predetermined direction increases in the eigen coordinate system which is coordinate axes for the three-dimensional sensor (11).
Information query
Patent Agency Ranking
0/0