Invention Application
- Patent Title: SENSOR DEGRADATION EVALUATION METHOD
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Application No.: US17818202Application Date: 2022-08-08
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Publication No.: US20220381608A1Publication Date: 2022-12-01
- Inventor: Masato MORIYA
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Main IPC: G01J3/02
- IPC: G01J3/02 ; G01J3/26

Abstract:
A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.
Public/Granted literature
- US11808629B2 Sensor degradation evaluation method Public/Granted day:2023-11-07
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