Various examples are provided of low power, rapid response on-device heaters and methods of calibrating the device within a linear operating region, which is reached and maintained through control of the on-device heater. A system to be calibrated includes a sensor to measure the temperature and relative humidity of the system, a heater coupled to the sensor, a heater controller coupled to the heater to control the heater to heat the system, and a processor coupled to the sensor and the heater controller. The processor controls the heater based on temperature measured by the sensor to perform a calibration process for the system including calculating a calibration factor, and to determine whether to abort the calibration process based on relative humidity measured by the sensor indicating that the system is outside the linear operating region.