Invention Application
- Patent Title: BACK-SIDE DEEP TRENCH ISOLATION STRUCTURE FOR IMAGE SENSOR
-
Application No.: US17883668Application Date: 2022-08-09
-
Publication No.: US20220384496A1Publication Date: 2022-12-01
- Inventor: Yu-Hung Cheng , Chun-Tsung Kuo , Jiech-Fun Lu , Min-Ying Tsai , Chiao-Chun Hsu , Ching I Li
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The present disclosure relates to an image sensor having a photodiode surrounded by a back-side deep trench isolation (BDTI) structure, and an associated method of formation. In some embodiments, a plurality of pixel regions is disposed within an image sensing die and respectively comprises a photodiode configured to convert radiation into an electrical signal. The photodiode comprises a photodiode doping column with a first doping type surrounded by a photodiode doping layer with a second doping type that is different than the first doping type. A BDTI structure is disposed between adjacent pixel regions and extending from the back-side of the image sensor die to a position within the photodiode doping layer. The BDTI structure comprises a doped liner with the second doping type and a dielectric fill layer. The doped liner lines a sidewall surface of the dielectric fill layer.
Information query
IPC分类: