Invention Application
- Patent Title: OXIDE SEMICONDUCTOR TRANSISTOR, METHOD OF MANUFACTURING THE SAME, AND MEMORY DEVICE INCLUDING OXIDE SEMICONDUCTOR TRANSISTOR
-
Application No.: US17540607Application Date: 2021-12-02
-
Publication No.: US20220384656A1Publication Date: 2022-12-01
- Inventor: Kwanghee LEE , Sangwook KIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0067899 20210526
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L29/66

Abstract:
The present disclosure relates to oxide semiconductor transistors, methods of manufacturing the same, and/or memory devices including the oxide semiconductor transistors. The oxide semiconductor transistor includes first and second compound layers provided on a substrate, a channel layer in contact with the first and second compound layers, a first electrode facing a portion of the channel layer, a second electrode facing the first compound layer with the channel layer therebetween, and a third electrode facing the second compound layer with the channel layer therebetween. An oxygen concentration of a region of the channel layer facing the first electrode is greater than that of the remaining regions of the channel layer. A buffer layer may further be provided between the channel layer and the second and third electrodes. The first and second compound layers may include oxygen and a metal.
Public/Granted literature
Information query
IPC分类: