Invention Application
- Patent Title: DEPOSITION APPARATUS HAVING MASK ASSEMBLY AND METHOD OF REPAIRING THE MASK ASSEMBLY
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Application No.: US17731799Application Date: 2022-04-28
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Publication No.: US20230009272A1Publication Date: 2023-01-12
- Inventor: MINHO MOON , YOUNGMIN MOON , JI-HEE SON , SEUNGYONG SONG
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2021-0090128 20210709
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00

Abstract:
A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
Public/Granted literature
- US12054820B2 Deposition apparatus having mask assembly and method of repairing the mask assembly Public/Granted day:2024-08-06
Information query
IPC分类: