Invention Publication
- Patent Title: METHOD OF DETERMINING A SAMPLING SCHEME, ASSOCIATED APPARATUS AND COMPUTER PROGRAM
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Application No.: US17916746Application Date: 2021-03-10
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Publication No.: US20230141495A1Publication Date: 2023-05-11
- Inventor: Hugo Augustinus Joseph CRAMER , Patricius Aloysius Jacobus TINNEMANS , Jeroen Arnoldus Leonardus Johannes RAAYMAKERS , Jochem Sebastiaan WILDENBERG
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Priority: WO 168243.2 2020.04.06 WO 168876.9 2020.04.09
- International Application: PCT/EP2021/056081 2021.03.10
- Date entered country: 2022-10-03
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
Disclosed is a method of determining a sampling scheme. The method comprises obtaining a parallel sensor description and identifying a plurality of candidate acquisition configurations based on said parallel sensor description and potential metrology locations. Each of said candidate acquisition configurations is evaluated in terms of an evaluation metric and a candidate acquisition configuration is selected based on said evaluation. The corresponding metrology locations for the selected acquisition configuration is added to the sampling scheme.
Information query
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