Invention Publication
- Patent Title: Substrate Conveying Robot and Substrate Conveying Robot System
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Application No.: US17528212Application Date: 2021-11-17
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Publication No.: US20230150120A1Publication Date: 2023-05-18
- Inventor: Haruhiko TAN , Shota TOMINAGA , Avish Ashok BHARWANI , Simon JEYAPALAN
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA , Kawasaki Robotics (USA), INC.
- Applicant Address: JP MI Kobe-shi
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA,Kawasaki Robotics (USA), INC.
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA,Kawasaki Robotics (USA), INC.
- Current Assignee Address: JP Kobe-shi; US MI Wixom
- Main IPC: B25J9/08
- IPC: B25J9/08 ; H01L21/687 ; H01L21/677 ; B25J11/00
Abstract:
A substrate conveying robot includes an arm, a substrate holding hand, a sensor board to which a sensor is electrically connected, and a control board on which a controller is mounted, the control board including a universal connector connectable to different types of the sensor boards.
Public/Granted literature
- US12162145B2 Substrate conveying robot and substrate conveying robot system Public/Granted day:2024-12-10
Information query
