Invention Publication
- Patent Title: INSPECTION APPARATUS AND METHOD FOR INSPECTING MAGNETIC SENSOR
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Application No.: US17981838Application Date: 2022-11-07
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Publication No.: US20230152396A1Publication Date: 2023-05-18
- Inventor: Kazuya WATANABE , Hiraku HIRABAYASHI
- Applicant: TDK CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TDK CORPORATION
- Current Assignee: TDK CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 21185095 2021.11.12
- Main IPC: G01R33/09
- IPC: G01R33/09

Abstract:
An inspection apparatus includes a stage having a placing surface, a first magnetic field generator, and a second magnetic field generator. The first magnetic field generator is configured to be changeable in orientation and to singly generate a first magnetic field. The second magnetic field generator is configured to be changeable in orientation and to singly generate a second magnetic field. The first and second magnetic field generators are configured to cooperatively generate a composite magnetic field in cooperation.
Public/Granted literature
- US12222409B2 Inspection apparatus and method for inspecting magnetic sensor Public/Granted day:2025-02-11
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