Invention Publication
- Patent Title: CONFIGURATION OF AN IMPUTER MODEL
-
Application No.: US17913305Application Date: 2021-03-22
-
Publication No.: US20230153582A1Publication Date: 2023-05-18
- Inventor: Reza SAHRAEIAN , Vahid BASTANI , Dimitra GKOROU , Thiago DOS SANTOS GUZELLA
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Priority: EP 170366.7 2020.04.20 EP 175361.3 2020.05.19 EP 187387.4 2020.07.23
- International Application: PCT/EP2021/057211 2021.03.22
- Date entered country: 2022-09-21
- Main IPC: G06N3/0475
- IPC: G06N3/0475

Abstract:
Apparatus and methods of configuring an imputer model for imputing a second parameter. The method includes inputting a first data set including values of a first parameter to the imputer model, and evaluating the imputer model to obtain a second data set including imputed values of the second parameter. The method further includes obtaining a third data set including measured values of a third parameter, wherein the third parameter is correlated to the second parameter; obtaining a prediction model configured to infer values of the third parameter based on inputting values of the second parameter; inputting the second data set to the prediction model, and evaluating the prediction model to obtain inferred values of the third parameter; and configuring the imputer model based on a comparison of the inferred values and the measured values of the third parameter.
Information query