Invention Publication
- Patent Title: PARALLEL TRANSFER APPARATUS
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Application No.: US17981685Application Date: 2022-11-07
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Publication No.: US20230154779A1Publication Date: 2023-05-18
- Inventor: Hyunjae KANG , Sangmin KIM , Youngwook KIM , Chuljun PARK , Jaesung BYUN , Sangkyung LEE , Hyunwoo LEE , Junhyuk CHANG
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210158372 2021.11.17
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01F7/02 ; B65G17/12

Abstract:
A transfer apparatus according to the disclosure includes a mast portion including a base portion, and a protrusion portion protruding from the base portion, and a plurality of shuttles configured to move along the mast portion, thereby transferring a carrier. The mast portion includes a first magnet track fixed to a first sidewall of the protrusion portion, and a second magnet track fixed to a second sidewall of the protrusion portion. Each of the plurality of shuttles includes a first coil portion adjacent to the first magnet track in a horizontal direction, and a second coil portion adjacent to the second magnet track in the horizontal direction. The protrusion portion, the first magnet track, and the second magnet track are disposed between the first and second coil portions.
Information query
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