Invention Publication
- Patent Title: NONVOLATILE MEMORY DEVICE
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Application No.: US17898682Application Date: 2022-08-30
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Publication No.: US20230171964A1Publication Date: 2023-06-01
- Inventor: Minho KIM , Hyunmook CHOI
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210167872 2021.11.30 KR 20220014358 2022.02.03
- Main IPC: H01L27/11573
- IPC: H01L27/11573 ; G11C16/04 ; H01L27/11529 ; H01L23/528 ; H01L27/1157 ; H01L27/11524 ; G11C16/08

Abstract:
A nonvolatile memory device including a first semiconductor structure including a first semiconductor substrate, a memory cell area including a plurality of memory cells disposed on the first semiconductor substrate, and a first metal pad disposed on the memory cell area; a second semiconductor structure including a second semiconductor substrate, a page buffer disposed on the second semiconductor substrate, and a second metal pad bonded to the first metal pad; and a third semiconductor structure including a third semiconductor substrate, a buffer memory and peripheral circuits disposed on the third semiconductor substrate, and a third metal pad connected to the peripheral circuits, wherein the page buffer includes a plurality of vertical transistors including a source area, a channel area, and a drain area sequentially stacked in a first direction, and the first semiconductor structure to third semiconductor structure are connected in the first direction.
Information query
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