Invention Publication
- Patent Title: ACETAL-BASED COMPOUND, ACETAL-BASED PREPOLYMER, ACETAL-BASED POLYMER, AND PHOTORESIST COMPOSITION COMPRISING THE SAME
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Application No.: US18055959Application Date: 2022-11-16
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Publication No.: US20230174471A1Publication Date: 2023-06-08
- Inventor: Chanjae AHN , Myungwoong KIM , Yoonhyun KWAK , Sol AN
- Applicant: Samsung Electronics Co., Ltd. , INHA Industry Partnership Institute
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.,INHA Industry Partnership Institute
- Current Assignee: Samsung Electronics Co., Ltd.,INHA Industry Partnership Institute
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210173266 2021.12.06 KR 20220132743 2022.10.14
- Main IPC: C07C321/14
- IPC: C07C321/14 ; C08G75/14
Abstract:
An acetal-based compound represented by Formula 1, an acetal-based prepolymer, an acetal-based polymer, and a photoresist composition including the same
wherein in Formula 1, R1 to R10, G, a, and b are as defined in the detailed description, and * indicates a linking site.
wherein in Formula 1, R1 to R10, G, a, and b are as defined in the detailed description, and * indicates a linking site.
Information query
