Invention Publication
- Patent Title: System and Method for Controlling Electrostatic Clamping of Multiple Platens on a Spinning Disk
-
Application No.: US17543150Application Date: 2021-12-06
-
Publication No.: US20230178405A1Publication Date: 2023-06-08
- Inventor: Scott E. Peitzsch , Robert Mitchell
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/20 ; H01J37/317

Abstract:
A system and method for controlling electrostatic clamping of multiple platens on a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on a spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The central hub provides the electrostatic clamping voltages to each of the plurality of platens. Further, the plurality of platens may also be capable of rotation about an axis orthogonal to the rotation axis of the central hub. The central hub controls the rotation of each of the platens. Power connections and communications are provided to the central hub via the spindle assembly.
Public/Granted literature
- US11670532B1 System and method for controlling electrostatic clamping of multiple platens on a spinning disk Public/Granted day:2023-06-06
Information query
IPC分类: