Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
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Application No.: US17933875Application Date: 2022-09-21
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Publication No.: US20230180455A1Publication Date: 2023-06-08
- Inventor: Hyun Geun Choi , Ki Seok Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210170881 2021.12.02
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
According to some embodiments of the present inventive concept, a semiconductor memory device includes a plurality of mold insulating layers on a substrate and spaced apart from one another, a plurality of semiconductor patterns which are between respective ones of the plurality of mold insulating layers adjacent to each other, a plurality of gate electrodes, on respective ones of the plurality of semiconductor patterns, an information storage element which includes a first electrode electrically connected to each of the plurality of semiconductor patterns, a second electrode on the first electrode, and a capacitor dielectric film between the first electrode and the second electrode, a bit line on the substrate and contacts the semiconductor pattern, and an insulating buffer film between the first electrodes and the second electrode and on a sidewall of a respective one of the plurality of mold insulating layers.
Information query
IPC分类: