Invention Publication
- Patent Title: CARRIER, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND INCLUDING THE CARRIER, AND METHOD OF MANUFACTURING DISPLAY APPARATUS
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Application No.: US18167761Application Date: 2023-02-10
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Publication No.: US20230193450A1Publication Date: 2023-06-22
- Inventor: Kyubum Kim , Sungjin Kim , Chunyoung Park , Uno Chang
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20180134444 2018.11.05
- The original application number of the division: US16531866 2019.08.05
- Main IPC: C23C14/04
- IPC: C23C14/04 ; G03F7/20 ; H01L21/687 ; H01L21/677 ; H10K71/00
Abstract:
A carrier, an apparatus for manufacturing a display apparatus and including the carrier, and a method of manufacturing a display apparatus are provided. The carrier includes a body portion; an electro permanent magnetic chuck arranged on a boundary portion of the body portion and configured to selectively fix a mask assembly; and a substrate fixing unit arranged in the body portion to selectively fix a display substrate.
Information query
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