An anode for a lithium-based energy storage device such as a lithium-ion battery is disclosed. The anode includes an electrically conductive current collector comprising an electrically conductive layer and a transition metal oxide layer overlaying the electrically conductive layer. The anode may include a continuous porous lithium storage layer provided over the transition metal oxide layer. The continuous porous lithium storage layer may include at least 80 atomic % amorphous silicon and a silicide-forming metallic element in a range of 0.1 to 10 atomic %. A method of making the anode may include providing an electrically conductive current collector having an electrically conductive layer and a transition metal oxide layer provided over the electrically conductive layer. The transition metal oxide layer may have an average thickness of at least 0.05 μm. A continuous porous lithium storage layer is deposited over the transition metal oxide layer by PECVD.