发明公开
- 专利标题: LASER INTERFEROMETER
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申请号: US18160381申请日: 2023-01-27
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公开(公告)号: US20230243636A1公开(公告)日: 2023-08-03
- 发明人: Kohei YAMADA
- 申请人: SEIKO EPSON CORPORATION
- 申请人地址: JP TOKYO
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP TOKYO
- 优先权: JP 22014849 2022.02.02
- 主分类号: G01B9/02001
- IPC分类号: G01B9/02001 ; G01B9/02
摘要:
A laser interferometer includes: a laser light source configured to emit first laser light; an optical modulator including a vibration element that generates a vibration component in a direction intersecting an incident surface of the first laser light, and configured to modulate the first laser light by using the vibration element to generate second laser light including a modulation signal; a photodetector configured to receive the second laser light and third laser light that includes a sample signal generated by the first laser light being reflected by an object, and output a light reception signal; a demodulation circuit configured to demodulate the sample signal from the light reception signal based on a reference signal; and an oscillation circuit configured to operate using the vibration element as a signal source and output the reference signal to the demodulation circuit.
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