- 专利标题: LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC SYSTEM INCLUDING THE SAME
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申请号: US18161740申请日: 2023-01-30
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公开(公告)号: US20230253895A1公开(公告)日: 2023-08-10
- 发明人: Andrea OPRENI , Valentina ZEGA , Attilio FRANGI , Gabriele GATTERE , Manuel RIANI
- 申请人: STMICROELECTRONICS S.r.l.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: IT 2022000002150 2022.02.07
- 主分类号: H02N1/00
- IPC分类号: H02N1/00 ; B81B3/00
摘要:
MEMS actuator including: a substrate; a first and a second semiconductive layer; a frame including transverse regions formed by the second semiconductive layer, elongated parallel to a first direction and offset along a second direction, the frame being movable parallel to the second direction. The MEMS actuator includes, for each transverse region: corresponding front rotor regions, which are fixed to the transverse region and are suspended above the substrate; a first and a second stator region, which are formed by the first semiconductive layer in such a way that, when the frame is in rest position, the transverse region is laterally offset with respect to the first and the second stator regions and a first front rotor region partially faces the first stator region, and in such a way that, during a translation of the frame along the second direction, the first and/or a second front rotor region at least partially face the second stator region, when the transverse region begins to superimpose on the first stator region.
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