- 专利标题: MEASUREMENT APPARATUS, MEASUREMENT METHOD, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD
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申请号: US18166695申请日: 2023-02-09
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公开(公告)号: US20230273011A1公开(公告)日: 2023-08-31
- 发明人: WATARU YAMAGUCHI
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22030176 2022.02.28
- 主分类号: G01B11/00
- IPC分类号: G01B11/00 ; G01B11/27 ; G01J9/00 ; G03F9/00 ; G03F7/20 ; G02B27/00 ; G02B26/06
摘要:
A measurement apparatus including an illumination system configured to illuminate a target with light including light of a first wavelength and light of a second wavelength, a wavefront changing unit configured to change a wavefront aberration in light from the target, and a control unit configured to control the wavefront changing unit, wherein the wavefront changing unit includes a first region where the light of the first wavelength enters, and a second region where the light of the second wavelength enters, and the control unit controls the wavefront changing unit such that a first correction wavefront for correcting a first wavefront aberration in the light of the first wavelength is generated in the first region, and a second correction wavefront for correcting a second wavefront aberration in the light of the second wavelength is generated in the second region.
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