Invention Publication
- Patent Title: METAL CHALCOGENIDE FILM AND METHOD AND DEVICE FOR MANUFACTURING THE SAME
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Application No.: US18332638Application Date: 2023-06-09
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Publication No.: US20230313365A1Publication Date: 2023-10-05
- Inventor: Kyung-Eun BYUN , Hyoungsub KIM , Taejin PARK , Hyeonjin SHIN , Hoijoon KIM , Wonsik AHN , Mirine LEEM
- Applicant: Samsung Electronics Co., Ltd. , RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.,RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- Current Assignee: Samsung Electronics Co., Ltd.,RESEARCH & BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
- Current Assignee Address: KR Suwon-si; KR Gyeonggi-Do
- Priority: KR 20190051818 2019.05.02
- Main IPC: C23C16/30
- IPC: C23C16/30 ; B22F7/00 ; C23C16/46 ; C23C16/448 ; C23C16/455 ; H01L21/02 ; H01L21/285 ; H01L31/032

Abstract:
Provided are a metal chalcogenide thin film and a method and device for manufacturing the same. The metal chalcogenide thin film includes a transition metal element and a chalcogen element, and at least one of the transition metal element and the chalcogen element having a composition gradient along the surface of the metal chalcogenide thin film, the composition gradient being an in-plane composition gradient. The metal chalcogenide thin film may be prepared by using a manufacturing method including providing a transition metal precursor and a chalcogen precursor on a substrate by using a confined reaction space in such a manner that at least one of the transition metal precursor and the chalcogen precursor forms a concentration gradient according to a position on the surface of the substrate; and heat-treating the substrate.
Public/Granted literature
- US2179976A Monitor cleaner Public/Granted day:1939-11-14
Information query
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