发明公开
- 专利标题: LIGHT SOURCE APPARATUS
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申请号: US17987145申请日: 2022-11-15
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公开(公告)号: US20230317396A1公开(公告)日: 2023-10-05
- 发明人: Yusuke Teramoto
- 申请人: Ushio Denki Kabushiki Kaisha
- 申请人地址: JP Tokyo
- 专利权人: Ushio Denki Kabushiki Kaisha
- 当前专利权人: Ushio Denki Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo,
- 优先权: JP 22057607 2022.03.30
- 主分类号: H01J35/10
- IPC分类号: H01J35/10
摘要:
A light source apparatus, in which an energy beam transforms a liquid raw material into plasma to extract radiation, includes a rotation body, a raw material supply section, and a layer thickness adjustment section. The rotation body is disposed at a position onto which the energy beam is incident, and includes a groove overlapping with an incident area of the energy beam. The raw material supply section supplies the groove with the liquid raw material. The layer thickness adjustment section adjusts a layer thickness of the liquid raw material such that a front surface of the liquid raw material forms a concave surface in response to the groove in the incident area of the energy beam.
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