- 专利标题: LASER DEVICE AND METHOD OF ALIGNING LASER DEVICE
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申请号: US18074721申请日: 2022-12-05
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公开(公告)号: US20230324679A1公开(公告)日: 2023-10-12
- 发明人: Seong Jin YEON , Voronov ALEXANDER , Jun Ho PARK , Je Kil RYU
- 申请人: Samsung Display Co., LTD.
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., LTD.
- 当前专利权人: Samsung Display Co., LTD.
- 当前专利权人地址: KR Yongin-si
- 优先权: KR 20220045027 2022.04.12
- 主分类号: G02B26/12
- IPC分类号: G02B26/12 ; G02B26/10 ; G02B26/04
摘要:
A laser device includes a light source part; an optical path adjustment part; a light distribution part that splits a laser beam into a plurality of sub-beams to a substrate; a drive part that moves the light distribution part and adjusts relative positions between the light distribution part and the substrate; a sensing part; and a control part. The control part generates an image based on a signal sensed by the sensing part and measures an image contrast of the image. The control part records and compares a plurality of image contrasts according to the position of the light distribution part to determine an optimal position of the light distribution part.
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