发明公开
- 专利标题: A FULL-FREQUENCY BAND HIGH QUALITY MEMS MICROPHONE WITH A BAR AND SOUND TUNNELS
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申请号: US18026223申请日: 2020-12-16
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公开(公告)号: US20230336923A1公开(公告)日: 2023-10-19
- 发明人: Haiou JIN , Nianbo WU , Xinxi HE , Xinzhi ZHU , Biying LI , Ping YANG
- 申请人: SUZHOU LI YUE MUSICAL INSTRUMENTS CO., LTD.
- 申请人地址: CN Suzhou, Jiangsu
- 专利权人: SUZHOU LI YUE MUSICAL INSTRUMENTS CO., LTD.
- 当前专利权人: SUZHOU LI YUE MUSICAL INSTRUMENTS CO., LTD.
- 当前专利权人地址: CN Suzhou, Jiangsu
- 优先权: CN 2010838771.3 2020.08.19
- 国际申请: PCT/CN2020/136855 2020.12.16
- 进入国家日期: 2023-03-29
- 主分类号: H04R19/04
- IPC分类号: H04R19/04 ; H04R7/12
摘要:
A full-frequency band high quality MEMS microphone with a bar and sound tunnels includes a sensor, acoustic chamber, and circuit board; the sensor includes a diaphragm and silicon back plate; the diaphragm is provided with a bar assembly; the bar assembly includes a plurality of arc-shaped bar members, arranged in a ring, and a gap is formed between the two adjacent members; the diaphragm has an annular area and at least two radial grooves on the same surface with the bar assembly; the radial grooves are arranged radially and uniformly, and then the surface of the diaphragm located outside the bar assembly is divided into multiple resonance regions; the radial grooves and gaps between the two arc-shaped bar members are matched one by one; each radial groove inner end is connected with the annular area; the radial groove is concave on surface of the diaphragm to form a sound tunnel.
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