A FULL-FREQUENCY BAND HIGH QUALITY MEMS MICROPHONE WITH A BAR AND SOUND TUNNELS
摘要:
A full-frequency band high quality MEMS microphone with a bar and sound tunnels includes a sensor, acoustic chamber, and circuit board; the sensor includes a diaphragm and silicon back plate; the diaphragm is provided with a bar assembly; the bar assembly includes a plurality of arc-shaped bar members, arranged in a ring, and a gap is formed between the two adjacent members; the diaphragm has an annular area and at least two radial grooves on the same surface with the bar assembly; the radial grooves are arranged radially and uniformly, and then the surface of the diaphragm located outside the bar assembly is divided into multiple resonance regions; the radial grooves and gaps between the two arc-shaped bar members are matched one by one; each radial groove inner end is connected with the annular area; the radial groove is concave on surface of the diaphragm to form a sound tunnel.
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