- 专利标题: METHOD AND APPARATUS FOR CONDUCTING SHEAR TESTS ON INTERCONNECT BONDS
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申请号: US18137484申请日: 2023-04-21
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公开(公告)号: US20230341305A1公开(公告)日: 2023-10-26
- 发明人: Keng Yew SONG , Zui Hong LEE , Jian Min CHEN , Mow Huat GOH , Kien Kia TAN
- 申请人: ASMPT Singapore Pte. Ltd.
- 申请人地址: SG Singapore
- 专利权人: ASMPT Singapore Pte. Ltd.
- 当前专利权人: ASMPT Singapore Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 优先权: CN 2210423284.X 2022.04.21
- 主分类号: G01N3/24
- IPC分类号: G01N3/24 ; G06T7/60 ; G06T7/246 ; G06T7/00
摘要:
A shear test is conducted on an interconnect bond formed on a surface of an electronic device by first determining a profile of the surface, and based on the determined profile, determining a shearing path which is at a substantially constant distance from the profile of the surface for a shear test tool to conduct the shear test on the interconnect bond. The shear test tool is then guided to move along the determined shearing path to measure a shear force of the interconnect bond.
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