发明公开
- 专利标题: SEMICONDUCTOR MEMORY DEVICE
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申请号: US18130769申请日: 2023-04-04
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公开(公告)号: US20230363142A1公开(公告)日: 2023-11-09
- 发明人: Intak Jeon , Hanjin Lim , Hyungsuk Jung
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR 20220055029 2022.05.03
- 主分类号: H10B12/00
- IPC分类号: H10B12/00
摘要:
A semiconductor memory device includes an interlayer insulating layer, a plurality of first contact pads embedded in the interlayer insulating layer, a plurality of first work function adjustment patterns embedded in the interlayer insulating layer and disposed on the plurality of first contact pads, and a plurality of lower electrodes disposed on the plurality of first work function adjustment patterns.
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