- 专利标题: AL-RICH ALCRN COATING LAYERS PRODUCED BY PVD FROM METALLIC TARGETS
-
申请号: US18247092申请日: 2021-09-30
-
公开(公告)号: US20230374650A1公开(公告)日: 2023-11-23
- 发明人: Siegfried KRASSNITZER , Marijana Mionic EBERSOLD
- 申请人: Oerlikon Surface Solutions AG, Pfäffikon
- 申请人地址: CH Pfäffikon
- 专利权人: Oerlikon Surface Solutions AG, Pfäffikon
- 当前专利权人: Oerlikon Surface Solutions AG, Pfäffikon
- 当前专利权人地址: CH Pfäffikon
- 优先权: DE 2020005956.2 2020.09.30
- 国际申请: PCT/EP2021/077042 2021.09.30
- 进入国家日期: 2023-03-29
- 主分类号: C23C14/06
- IPC分类号: C23C14/06 ; C23C14/32 ; C23C14/54
摘要:
A coating layer and a method for producing thereof, wherein the coating layer includes Al, Cr and N as main components according to formula (AlaCrb)xOyCzNq, where a and b are respectively the concentration of aluminium and chromium in atomic ratio considering only Al and Cr for the calculation of the element composition in the layer, whereby a+b=1 and 0≠a≥0.7 and 0≠b≥0.2, and where x is the sum of the concentration of Al and the concentration of Cr, and y, z and q are the concentration of oxygen, carbon and nitrogen respectively in atomic ratio considering only Al, Cr, O, C and N for the calculation of the element composition in the layer, whereby x+y+z+q=1 and 0.45≤x≤0.55, 0≤y≤0.25, 0≤z≤0.25, and wherein the coating layer exhibits 90% or more of fcc cubic phase, and compressive stress of 2.5 GPa or more, preferably between 2.5 GPa and 6 GPa.
信息查询
IPC分类: