The disclosure provides a method for preparing an electrode film layer on a surface of a solar cell substrate. The method includes: a) obtaining a metal electrode material melt by heating and melting a metal electrode material under a vacuum condition; b) bombarding the metal electrode material melt with an ion source at low energy, so that it is sputtered and deposited on the surface of the solar cell substrate to form the electrode film layer; in which the energy of low energy bombarding is 30 eV to 80 eV.