- 专利标题: INTEGRATED ULTRASONIC TRANSDUCERS
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申请号: US18236233申请日: 2023-08-21
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公开(公告)号: US20230389897A1公开(公告)日: 2023-12-07
- 发明人: Janusz Bryzek , Sandeep Akkaraju , Yusuf Haque , Joe Adam
- 申请人: Exo Imaging, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Exo Imaging, Inc.
- 当前专利权人: Exo Imaging, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: A61B8/00
- IPC分类号: A61B8/00 ; H01L23/00 ; B06B1/02 ; B06B1/06 ; G01S15/89 ; B81B7/00
摘要:
Described are transducer assemblies and imaging devices comprising: a microelectromechanical systems (MEMS) die including a plurality of piezoelectric elements; a complementary metal-oxide-semiconductor (CMOS) die electrically coupled to the MEMS die by a first plurality of bumps and including at least one circuit for controlling the plurality of piezoelectric elements; and a package secured to the CMOS die by an adhesive layer and electrically connected to the CMOS die.
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