Invention Publication
- Patent Title: SEMICONDUCTOR DEVICE, MANUFACTURING METHOD, SOLID STATE IMAGE SENSOR, AND ELECTRONIC EQUIPMENT
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Application No.: US18238082Application Date: 2023-08-25
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Publication No.: US20230402411A1Publication Date: 2023-12-14
- Inventor: Masaki HANEDA
- Applicant: SONY GROUP CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SONY GROUP CORPORATION
- Current Assignee: SONY GROUP CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 15104705 2015.05.22
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L27/14 ; H01L25/065 ; H01L27/146 ; H01L21/3205 ; H01L21/768 ; H01L23/522 ; H01L23/532

Abstract:
Connection pads are formed in interlayer films provided respectively in interconnection layers of a sensor substrate on which a sensor surface having pixels is formed and a signal processing substrate configured to perform signal processing on the sensor substrate to make an electrical connection between the sensor substrate and the signal processing substrate. Then, a metal oxide film is formed between the interlayer films of the sensor substrate and the signal processing substrate, between the connection pad formed on a side toward the sensor substrate and the interlayer film on a side toward the signal processing substrate, and between the connection pad formed on the side toward the signal processing substrate and the interlayer film on the side toward the sensor substrate. The present technology can be applied to a laminated-type CMOS image sensor, for example.
Information query
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