- 专利标题: DIELECTRIC COATED LITHIUM METAL ANODE
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申请号: US17976420申请日: 2022-10-28
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公开(公告)号: US20230056566A1公开(公告)日: 2023-02-23
- 发明人: Subramanya P. HERLE , David Masayuki ISHIKAWA
- 申请人: Applied Materials, Inc.
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01M4/1395
- IPC分类号: H01M4/1395 ; C23C14/56 ; C23C14/24 ; C23C14/30 ; C23C14/34 ; H01M4/38 ; H01M4/134 ; H01M4/62 ; H01M4/04 ; C23C14/14 ; H01M4/36
摘要:
Methods for forming anode structures are provided and include transferring a flexible substrate a first deposition chamber arranged downstream from a first spool chamber, the first deposition chamber containing a first coating drum capable of guiding the flexible substrate past a first plurality of deposition units, and guiding the flexible substrate past the first plurality of deposition units while depositing a lithium metal film on the flexible substrate via the first plurality of deposition units. The method also includes transferring the flexible substrate from the first deposition chamber to a second deposition chamber, the second deposition chamber containing a second coating drum capable of guiding the flexible substrate past a second deposition unit containing a crucible capable of depositing ceramic on the lithium metal film, and guiding the flexible substrate past the crucible while depositing a ceramic protective film on the lithium metal film via the evaporation crucible.
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