- 专利标题: MULTILAYER PIEZOELECTRIC SUBSTRATE DEVICE WITH POSITIVE TEMPERATURE COEFFICIENT OF FREQUENCY DIELECTRIC FILM FOR TEMPERATURE STABILITY
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申请号: US17929066申请日: 2022-09-01
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公开(公告)号: US20230117464A1公开(公告)日: 2023-04-20
- 发明人: Rei Goto , Hironori Fukuhara
- 申请人: Skyworks Solutions, Inc.
- 申请人地址: US CA Irvine
- 专利权人: Skyworks Solutions, Inc.
- 当前专利权人: Skyworks Solutions, Inc.
- 当前专利权人地址: US CA Irvine
- 主分类号: H03H9/64
- IPC分类号: H03H9/64 ; H03H9/02
摘要:
An acoustic wave filter includes a substrate and a piezoelectric layer over the substrate. First acoustic wave resonators are disposed over the piezoelectric layer and arranged in series along a first branch, and second acoustic wave resonators are disposed over the piezoelectric layer, arranged in parallel, and connected to the first branch and to ground. The first and second acoustic wave resonators include an interdigital transducer electrode interposed between a pair of reflectors. A layer of positive temperature coefficient of frequency dielectric material is disposed over one or more of the first plurality of acoustic wave resonators to control the temperature coefficient of frequency and improve temperature stability of the acoustic wave filter.