Invention Application
- Patent Title: MASK ASSEMBLY AND DEPOSITION APPARATUS OF THE SAME
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Application No.: US17963944Application Date: 2022-10-11
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Publication No.: US20230119614A1Publication Date: 2023-04-20
- Inventor: Sangshin LEE , Sanghoon KIM , Jongsung PARK , Sang Min YI , Seungjin LEE , Eunjoung JUNG
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2021-0137926 20211015
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00

Abstract:
A mask assembly includes a first mask having a first opening and at least one second mask disposed on the first mask, each at least one second mask including a deposition area having second openings, an inner area surrounding the deposition area, and an outer area having third openings which surround the margin area. A line defining the outer boundary of an inner surface which defines the first opening overlaps the inner area when viewed in plan.
Information query
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